11æ7æ¥ã«æ±äº¬ã§éå¬ããããimec Technology Forum(ITF Japan 2022)ãã«ãããŠãããžãã¯åå°äœã®åŸ®çްåãããã«é²å±ãããããã«ã¯ãéç©ã·ã¹ãã æ§æãšããã»ã¹æè¡ãšã®åææé©åã§ãããSystem-Technology Co-Otimization(STCO)ããä»åŸã¯éèŠã«ãªããšimecã®ããžãã¯ãã¯ãããžãŒæ åœãã€ã¹ãã¬ãžãã³ãã§ããJulien Ryckaert(ãžã¥ãªã¢ã³ã»ãªã«ã«ã)æ°ã匷調ãããåæ°ã«imecã§çºè¶³ããSTCOããã°ã©ã çºè¶³ã®èæ¯ãçãã«ã€ããŠãããã£ãã
Julien Ryckaertæ°ã¯ã2000幎ã«ãã«ã®ãŒã®ããªã¥ãã»ã«å€§åŠ(ULB)ã§é»æ°å·¥åŠã®ä¿®å£«å·ãååŸãã2007幎ã«ããªã¥ãã»ã«èªç±å€§åŠ(VUB)ã§å士å·ãååŸã2010幎ã«imecã«å ¥ç€ŸããADã³ã³ããŒã¿ãRFãã©ã³ã·ãŒããŒãªã©ã®ããã¯ã¹ãã·ã°ãã«åè·¯èšèšã«åŸäºåŸã2013幎ããå 端CMOSãã¯ãããžãŒããŒãåãã®åè·¯èšèšã»ããã»ã¹æè¡åææé©å(DTCO)ãã©ãããã©ãŒã æ§ç¯ãæ åœãã2018幎ããã¯3nmãã¯ãããžãŒããŒããè¶ ããã¹ã±ãŒãªã³ã°ãšCMOSã®3Dåã«ãããšãªã¢ã¹ã±ãŒãªã³ã°ã«çŠç¹ãåœãŠãããã°ã©ã ãã£ã¬ã¯ã¿ãŒã«å°±ä»»ããŠããã
-

imecã®ããžãã¯ãã¯ãããžãŒæ åœãã€ã¹ãã¬ãžãã³ãã§ããJulien Ryckaert(ãžã¥ãªã¢ã³ã»ãªã«ã«ã)æ° (åºæ:imec)
imecãèŠæ®ããä»åŸã®åå°äœã®é²åã®æ¹åæ§
ïŒ:å°æ¥ã®ã¹ã±ãŒãªã³ã°(埮现å)æè¡éçºã«ãããæå€§ã®èª²é¡ã¯äœã ãšèªèããŠããŸããïŒ
Julien Ryckaertæ°:çŸåšãåå°äœæ¥çå šäœã倧ããªè»¢ææãè¿ããŠããŸãã 10幎以äžã«ããããã ãŒã¢ã®æ³åãããå ·äœçã«ã¯ãããŒãã®æ³å(MOSãã©ã³ãžã¹ã¿ã«é¢ããã¹ã±ãŒãªã³ã°å)ã«è§Šçºããã寞æ³ã¹ã±ãŒãªã³ã°ã¯ãCMOSãã¯ãããžãŒããŒãã®å°æ¥ãäºæž¬ããããã¡ãŒã¿ãŒãšããŠäœ¿çšã§ããªãããšãæããã«ãªã£ãŠããŸããã
ããã¯ãçŸåšãã¹ã±ãŒãªã³ã°ã®å£ããšåŒã°ããããã€ãã®èŠå ã«èµ·å ããŠããŸããCMOSã³ã³ããŒãã³ãã®å¯žæ³ãçž®å°ããããšãéåžžã«å°é£ã«ãªããè²»çšããããããã«ãªã£ãŠããã ãã§ãªããåå°äœæ¥çã¯ãè€éãªã·ã¹ãã ã§ã®é»åãšéåºŠã®æ·±å»ãªé害ã«çŽé¢ããŠããŸãã
æè¡ã¬ãã«ã§ã¯ãåè·¯èšèšã»ããã»ã¹æè¡åææé©å(DTCO)ã«ãã£ãŠãµããŒããããæ°ããããã€ã¹ã¢ãŒããã¯ãã£ãšã¹ã±ãŒãªã³ã°ããŒã¹ã¿ãŒã«ãããæ¬¡ã®2äžä»£ã®CMOSããŒããŸã§ã¯ããçšåºŠã®é¢ç©ã¹ã±ãŒãªã³ã°ãç¶æã§ããŸãããããããããŸã§ã§åã䜿ãæãããŠããŸãããå°ãªããšãå°æ¥ã®ã¢ããªã±ãŒã·ã§ã³ã®ã·ã¹ãã ã¹ã±ãŒãªã³ã°ãæäŸããã®ã«ååã§ã¯ãããŸãããã¢ãŒããã¯ãã£ã¬ãã«ã§ã¯ãè€éãªã¡ã¢ãªéå±€ããã«ãã³ã¢ããã«ãã¹ã¬ãããããã³åäžã®SoCãŸãã¯ãããã¬ããã§ã®ã³ã¢ã®ç¹æ®å(xPUå)ãããããã®ã¹ã±ãŒãªã³ã°ã®å£ãå æããæ¹æ³ã«ãªã£ãŠããŸãã
仿¥ãç§ãã¡ãçŽé¢ããŠããåé¡ã¯ããããã®ã€ãããŒã·ã§ã³ã®ã»ãšãã©ããçã®éç©ã·ã¹ãã ã¢ãŒããã¯ãã£ãšããã»ã¹ãã¯ãããžãŒã®åææé©åã®çµæã§ã¯ãªããšããããšã§ããä»åŸã®æå€§ã®èª²é¡ã¯ãäž»èŠãªã·ã¹ãã ã¹ã±ãŒãªã³ã°ã®ããã«ããã¯ãè§£ãæŸã€ããšãã§ããé©åãªãã¯ãããžãŒèŠçŽ ãèŠåºãããšãšãæ°ããªãã¯ãããžãŒã«ããæ°ããã³ã³ãã¥ãŒãã£ã³ã°æ¹æ³ãã©ã®ããã«å¯èœã«ãªãããæ¢ãããšã§ããããããã·ã¹ãã æè¡å ±åæé©å(STCO)ã®ç®çã§ãã
ïŒ:imecã¯ä»åŸã®èª²é¡ã®å æã«ã©ã®ããã«è²¢ç®ããŸããïŒ
Julien Ryckaertæ°:imecã¯ãããšããšãšã³ã·ã¹ãã ã®ãã¯ãããžãŒåŽã«äœçœ®ãããšã³ã·ã¹ãã ã«çã®å·®å¥åããããããŠããŸããããã ããå°æ¥ã®ãã¯ãããžãŒãå®çŸ©ããäžã§ãªãŒããŒã·ãããçºæ®ããå¿ èŠããããããã·ã¹ãã ã¹ã±ãŒãªã³ã°ã«é¢ãããã¯ãããžãŒããŒãããããå å®ãããå¿ èŠããããŸãããã®é²åã¯åºæ¬çã«ãåŸæ¥ã®ãæ±çšããã¯ãããžãŒã®æäŸããäžæ©èžã¿åºããŠãAIãHPCãAR/VRãªã©ã®ã¢ããªã±ãŒã·ã§ã³åºæã®èŠä»¶ã«ãã£ãŠãœãªã¥ãŒã·ã§ã³ãæšé²ããããšããäºå®ãåãå ¥ããå¿ èŠãããããšãæå³ããŸãã
ããã«ãæé©ãªã·ã¹ãã å®è£ ã«ã¯ã極éã®CMOSããžãã¯ã¹ã±ãŒãªã³ã°ãé«åºŠãª3Dããã±ãŒãžã³ã°ãæ°ããã¡ã¢ãªèŠçŽ ãããã«ã¯ã·ãªã³ã³ãã©ããã¯ã¹ãªã©ãè€æ°ã®ãã¯ãããžãŒã«ããã埮åŠãªæé©åãå¿ èŠã§ãããããã®ããŸããŸãªæè¡ç 究掻åã¯ããããŸã§å¥ã ã«å®æœãããŠãããããããã«ç¬èªã®DTCOç ç©¶ãšããŒããããããããŸããã
ã·ã¹ãã äž»å°ã®ã¹ã±ãŒãªã³ã°ãžã®ç§»è¡ã«åããããã«ãimecãæäŸããã³ã¢ããã°ã©ã ãåç·šæãããã¹ãŠã®DTCOã¢ã¯ãã£ããã£ã1ã€ã®ããã°ã©ã ã«çµ±åããŸããããã®ããã°ã©ã ã¯ããã¹ãŠã®ã³ã¢ãã¯ãããžãŒããã°ã©ã ã«ããã£ãŠããã»ã¹ãã¯ãããžãŒããåè·¯èšèšã®æé©åãŸã§ãç ç©¶ããŸãããã®DTCOããã°ã©ã ããDTCOç ç©¶ãšã·ã¹ãã ãæ§ç¯ãã空éãšã®é£æºã確ä¿ããSTCOããã°ã©ã ã§è£å®ããŸããããã®STCOããã°ã©ã ã®ç®æšã¯ãå°æ¥ã®ã·ã¹ãã ããŒãºãšããã«ããã¯ããããããŠã³ã¢ãããŒãã§ããã»ã¹æè¡èŠä»¶ã«å€æããããšã§ãããŸããç¬èªã®æ¬æ°ãªããã»ã¹æè¡æ©èœã掻çšããæ°ããã¢ãŒããã¯ãã£ãå¯èœã«ããå¯èœæ§ãæ¢ããŸãã
ïŒ:imecã®STCOã¯ã©ã®ãããªé²æ©ãéããŠããŸããïŒãæè¿ã®äŸã§ãããè£ä»ããããšãã§ããŸããïŒ
Julien Ryckaertæ°:ç§ãã¡ã®ã³ã¢ãã¯ãããžãŒ(æ žãšãªãæè¡ãäŸãã°ãããžãã¯ãã¡ã¢ãªã3Då®è£ ãªã©ã®å奿è¡)ããã°ã©ã ã®ããããã§ããã§ã«ããçšåºŠã®ã·ã¹ãã è©äŸ¡ãå¿ èŠãªåå¥ã®ç 究掻åãéå§ããŸããã
è¯ãäŸã¯ã2022 VLSIã·ã³ããžãŠã ã§çºè¡šããè£é¢é»æºäŸçµŠãããã¯ãŒã¯ã§ãããã®äœæ¥ã¯ã3Dããã°ã©ã ã¢ã¯ãã£ããã£ãšããžãã¯ã¢ã¯ãã£ããã£ã飿ºããŠé»åäŸçµŠã®ã·ã¹ãã ãœãªã¥ãŒã·ã§ã³ãéçºããçµæã§ããè£é¢æè¡ã¯ããŠã§ããã³ããªã³ã°ãã·ãªã³ã³è²«éãã¢(TSV)åŠçãªã©ã®3Dæè¡æ©èœãå¿ èŠãšããã®ãšåæ§ã«ãããžãã¯ã¹ã±ãŒãªã³ã°ããŒããããã«å€§ãã圱é¿ããŸããããããè£é¢é»æºäŸçµŠãããã¯ãŒã¯ãçã®ã·ã¹ãã ããã©ãŒãã³ã¹ã®å©ç¹ãããããçç±ã𿹿³ãçè§£ããã«ã¯ãããè€éãªç°å¢ã§ã®åäœãè©äŸ¡ããã·ã¹ãã æ§æãæ·±ãæãäžããå¿ èŠããããŸãã2021幎ã«ãIEEE Spectrumã§ãimecãšArmã¯ãããã»ããµèšèšã¬ãã«ã§ãã¯ãŒã¬ãŒã«ãåã蟌ãã è£é¢é»æºäŸçµŠãããã¯ãŒã¯ã®ã·ã¹ãã ã¬ãã«ã®å©ç¹ãå ±åããŸããã
ãã1ã€ã®äŸã¯ããªã³ãããSRAMã眮ãæããããšãæ³å®ãããŠããæ°ããã¡ã¢ãªã§ãããã®ãããªã¡ã¢ãªãœãªã¥ãŒã·ã§ã³ã¯ãå¿ ç¶çã«ããžãã¯ã¹ã±ãŒãªã³ã°ã®ããŒããããã«åœ±é¿ãäžããã·ã¹ãã ã·ãã¥ã¬ãŒã·ã§ã³ãã¬ãŒã ã¯ãŒã¯ã§ã®ã¿è©äŸ¡ã§ããŸããèšããŸã§ããªãããããã®ã¡ã¢ãªã®ããã€ãã¯3Dã§ç©ã¿éããããŠããå¯èœæ§ããããŸãã
ãããã®äŸã§ã·ã¹ãã ã¬ãã«ã®èª²é¡ã«åãçµã¿å§ãããšããã«ãããããã®äŸã§ããã¹ãŠã®ãã¯ãããžãŒãœãªã¥ãŒã·ã§ã³ãäºãã«çµ¡ã¿åã£ãŠããããšã«æ°ä»ããŸãããããžãã¯ãã¡ã¢ãªãããã³3Dããã°ã©ã ã®ãã¯ãããžãŒç ç©¶ã¯ããã¯ãåå¥ã®ããµã€ãã(ç©ç©ã飌æã®æ©å¯æ§ãä¿ã£ã貯èµåº«ããããã転ããŠãçµç¹éã®æ å ±å ±æã颚éããæªãçµç¹éå¶ãéå¹çãªæ§ã®æ¯å©)ã§åŠçã§ããªãããšãæããã«ãªããŸããããããã®ç ç©¶ã¯åæã«å®è¡ãããã·ã¹ãã ã¢ããªã±ãŒã·ã§ã³ãæé©ã«ãªãããã«ããªããã°ãªããŸãããã·ã¹ãã ã®èгç¹ããåæãããå€ãã®ç 究掻åããã§ã«ååšããããããŒãããå§ããªããã°ãªããªãããã§ã¯ãªãã£ãããšã¯ããã£ãã§ãã
ïŒ:ä»åŸæ°ãæã§äœãæåŸ ã§ããŸããïŒ
Julien Ryckaertæ°:ç§ãã¡ã¯ãæ°ããDTCO/STCOããã°ã©ã ã®ã»ããã¢ãããç ç©¶å¥çŽããŒãããŒã«çºè¡šããã°ããã§ãä»åŸ6ãæéã®äžé£ã®ææäºæž¬ãé åžãããšããã§ãããããã¯ãã·ã¹ãã ã®ã¹ã±ãŒãªã³ã°ã«äžå¯æ¬ ãª3ã€ã®å£ãã€ãŸãã
- ã¡ã¢ãª/垯åå¹ ã®å£(ããžãã¯ã³ã¢ã«äŸçµŠããã®ã«ååãªé床ã§ããŒã¿ãååŸããæ¹æ³)
- é»å/ç±ã®å£(é»åäŸçµŠãšç±æŸæ£ãå¹ççã«åŠçããæ¹æ³)
- 寞æ³ã¹ã±ãŒãªã³ã°ã®å£
ã«é¢é£ããŠããŸãã
ãã¡ããããã®ç ç©¶ããŒãããããããŒãããŒãšèª¿æŽããæ¥çã«ãšã£ãŠé©åãªèª²é¡ã«åãçµãã§ããããšã確èªããå¿ èŠããããŸããããã«ã¯ããã¹ãŠã®ããŒãããŒãšã®ç¶¿å¯ãªè©±ãåããå¿ èŠã§ããããããã¯ãã§ã«éå§ããŠããŸãã
ïŒ:ãã®ããã°ã©ã ãèšå®ããäžã§ãimec ãäžçã®åå°äœæ¥çã§åªäœãªçç±ã¯äœã§ããïŒ
Julien Ryckaertæ°:çã®STCOç ç©¶ã«ã¯ãå€ãã®åéãçµ±åããå¿ èŠããããŸãããããããã®åéã倧ããç°ãªãã¹ã±ãŒã«ãæ±ããæœè±¡åã®ç°ãªããã¡ã€ã³ã§ç¬èªã®ç§åŠãé©çšããŠããŸãã
çã®èª²é¡ã¯ãéäžã§éèŠãªæ å ±ã倱ãããšãªãããããã¡ã€ã³ããå¥ã®ãã¡ã€ã³ã«é©åãªæœè±¡åã¬ã€ã€ã®ã»ãããæ§ç¯ããããšã§ããããã¯ãå®å šãªã·ã¹ãã æé©åãå®è¡ããããã«æ å ±ãäžããäžãžãäžããäžãžäŒéããå¯äžã®æ¹æ³ã§ãã
ãããé©åã«è¡ãã«ã¯ãåãã¡ã€ã³ã§é©åãªå°éç¥èãå¿ èŠãªã ãã§ãªãããããã®åéãäºãã«å¯æ¥ã«çžäºäœçšããå¿ èŠããããŸããimecã¯ããããã®åéã®ã»ãšãã©ãåã屿 ¹ã®äžã«ããã坿¥ã«é£æºããŠããç¬èªã®ã€ã³ãã©ã¹ãã©ã¯ãã£ãä¿æããŠããŸããããã«ãããã¢ã€ãã¢ã®äº€æãæ å ±ã®åæ»ãªäŒéãããã³çµæãšè§£éã«å¯Ÿããæ¹å€çãªèŠç¹ã®æ¡å€§ãä¿é²ãããŸãããã¹ãŠã®ã³ã¢ããã°ã©ã ã«ãããŠããã®STCOãåé²ããããšã«å€§ããªæåŸ æããããŸããã©ã®åéã®åºèº«ã§ãã£ãŠããåå°äœç ç©¶ã®å°æ¥ã«å€åãããããã«ã¯STCOãã¬ãŒã ã¯ãŒã¯ãå¿ èŠã§ããããšã誰ããçè§£ããŠããããã§ããimecã¯ããã®ãããªã€ãã·ã¢ãããéå§ããã®ã«æé©ãªå Žæã ãšæããŸãã
